Self-polarization and texture of wet chemically derived lead zirconate titanate thin films

Abstract A multilayer structure of Si/SiO2/Ti/Pt/TiO2 was used as a bottom electrode for pyroelectric Pb(Zr0.25Ti0.75)O3 (PZT) thin films. A wet chemical approach was used for PZT deposition. The interrelations between the bottom electrode and the crystallographic orientation of the PZT thin films as well as correlations between microstructure and electrical properties were studied in detail. Annealing of Ti/Pt electrodes prior to PZT deposition caused Ti diffusion and oxidation, which influenced texture and film quality. The combination of a sputtered TiO2 seed layer with an intermediate heating step at around 400°C yielded dense and columnar PZT(111). The films showed a pyroelectric coefficient and a built-in polarity after preparation.