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Nanochemistry and Structure of Zr and Hf Based High Dielectric Constant Films
Nanochemistry and Structure of Zr and Hf Based High Dielectric Constant Films
2003
M. Floyd
R. W. Carpenter
Sandwip K. Dey
S. Marcus
H. De Waard
C. Werkhoven
Keywords:
Metallurgy
High-κ dielectric
Materials science
Nanochemistry
Composite material
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