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The Effect of Mechanical Properties of Polishing Pads on Oxide CMP
The Effect of Mechanical Properties of Polishing Pads on Oxide CMP
2002
Yi-Koan Hong
Dae-Hong Eom
Young-Jae Kang
Jin-Goo Park
Jae Suk Kim
J. S. H. Lee
In-Ha Park
Keywords:
Oxide
Elastic modulus
Materials science
Polishing
Composite material
Correction
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