Thin film technology handbook

Contributors. Preface. Film Deposition Techniques and Processes. Pattern Generation Techniques. Properties of Thin film Materials. Principles and Properties of Semiconductor Thin Films. Design Guidelines for Thin film Components and Construction of Thin Film Modules. Characterization of Semiconductor Thin Films: A Compendium of Techniques. Diamond Films. Thin Film Optical Materials. Thin Film Packaging and Interconnect. Thin Film for Microwave Hybrids. Yield, Testing, and Reliability.