Emissions Monitoring and Exhaust Analysis for the Axcelis Optima HD IMAX Ion Implanter

As integrated circuit features continue to become smaller, it has become difficult to meet the challenges of shallow junction implant using conventional ion implant dopant species. To meet this challenge, Axcelis has developed the Optima HD IMAX, a new ion implant tool that uses the molecular dopant species octadecaborane (ClusterBoron®, B18H22) and also has the capability to perform carbon implants using at least two molecular carbon‐based species (ClusterCarbon™, C14H14 and C16H10). An additional feature of the tool is an integrated chemical clean based on NF3 remote plasma technology. The use of new materials in this tool has generated the need for understanding the potential emissions and release vectors of the process materials and their byproducts. Presented here are data on exhaust emissions obtained using Fourier Transform Infrared (FTIR) spectroscopy. Additionally, FTIR spectroscopy has been used to measure concentration levels of residual species that might be found in the source and process cha...