Combination of LPCVD and PECVD SiC in fabricating evanescent waveguides

As a promising material in MEMS field, SiC is widely used to fabricate sensors in many applications. Considering its fabrication potential and optical properties, SiC was chosen as the core material of evanescent waveguide sensor in this paper. LPCVD and PECVD deposition were combined in fabricating the waveguide. To reduce the coupling loss and misalignment effect, 3D tapered couplers were designed to be added to the input and output of the waveguide and a novel slope transfer method was investigated to fabricate the taper slope. In initial experiments we have achieved a slope of 16.7°.