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Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing
Investigation of Si-based thermoelectrochemical cells (TECs) towards semiconductor fabrication and processing
2021
Megat Muhammad Ikhsan Megat Hasnan
Nayan Nafarizal
Khairul Ahmad
Rosnah Mohd Zin
Chin Fhong Soon
Suhana Mohd Said
Mohamed Sultan Mohamed Ali
Mohd Faizul Mohd Sabri
Khairul Anuar Mohamad
Mohd Faiz Mohd Salleh
Keywords:
Materials science
Optoelectronics
Semiconductor device fabrication
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