Ultraviolet light-emitting diodes and photodiodes grown by plasma-assisted molecular beam epitaxy

We demonstrate a Schottky ultraviolet photodiode (UV-PD) and a UV light-emitting diode (UV-LED) based on AlGaN heterostructures grown by plasma-assisted molecular beam epitaxy. The spectral responsivity of the Schottky UV-PD is 3 mA/W at 271 nm at zero bias and decreases by two orders of magnitude for the spectral range of longer wavelengths ( > 300 nm). The sub-monolayer digital alloying technique was used for growing the AlGaN quantum wells in UV-LEDs emitting a single electroluminescence peak at 273 nm.