Single crystallization of Al interconnection wires

We consider the formation mechanism of the single crystallization of Al interconnection wires fabricated on a SiO2 groove, in terms of the classical solidification theory that is modified by our model for the size-dependent solid–liquid interface energy. With this modification, the nucleation time and growth temperature are correctly predicted. At the growth temperature, the growth time of a formed Al nucleus along the full length of the SiO2 groove in 5 mm is shorter than the time taken to form one nucleus. This leads to heterogeneous single crystallization of Al interconnection wires, as shown in the published experimental data.