Very large area YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} film deposition

Large area deposition of YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} is desirable for cost-effective production of thin superconducting films at larger scale. The authors` technique of thermal co-evaporation should be particularly well suited for this goal because it is intrinsically homogeneous. They have achieved large area deposition by using a rotating disk heater with an oxygen pocket. This arrangement allows for intermittent metal deposition and oxidation in spatially separated zones. Here they present an improved version of this deposition scheme with which they fabricate high quality YBCO films on an area which is 9 inches in diameter. The area is used for simultaneous deposition on smaller wafers, e.g. 12 wafers of 2 inches, or for large sapphire wafers of 8 inches.