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J161034 Formation of Si02 Electret on Comb-drive Actuator
J161034 Formation of Si02 Electret on Comb-drive Actuator
2011
Tatsuhiko Sugiyama
Mitsuru Aoyama
Gen Hashiguchi
Keywords:
Actuator
Comb drive
Electret
Electronic engineering
Materials science
Optoelectronics
Correction
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