Mold process for producing a substrate having a manufacturing method thereof and transferred micropattern

Optical transparency and releasability is high and the maximum height mold having a relatively large fine patterns, to provide a process for producing a substrate having a transferred micropattern using the manufacturing method and the mold. Glass transition temperature is a fluoropolymer (I) and the fluoropolymer (II) a glass transition temperature less is transparent resin, based on surface of the intermediate layer (C) is formed on the functional groups (x) chemical a transparent resin layer having a bond with (a) 12, the main chain has a fluorinated aliphatic ring structure, a fluorine-containing polymer having a functional group (x) and reactivity of the reactive groups (y) (II) an intermediate layer (C) 14, the main chain has a fluorinated aliphatic ring structure, and a surface layer (B) 16 made of a reactive group having no fluoropolymer (y) (I) , the maximum height of the fine pattern, exceeds the sum of the thickness of the intermediate layer of the surface layer (B) of (C) the thickness of the mold 10.