Adaptive Inverse Control of Piezoelectric Actuators Based on Segment Similarity

The hysteresis behavior of piezoelectric actuators is primarily responsible for the decrease of the precision and performance of the nanopositioning systems. To compensate for hysteresis, an inverse model is proposed in this paper as a segment similarity feedforward compensator. Furthermore, the inverse model is improved by using an adaptive method to eliminate the accumulated error of the similarity compensator. The proposed adaptive similarity compensator has the advantages of simple structure, less storage space, and fast calculation speed, and it is available for most engineering situations. Experiments are carried out with the proposed similarity compensator and adaptive similarity compensator. The experimental results show that the compensator can achieve good results and better performance, especially for high-frequency excitations.