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Comparative simulation of microwave probes for plasma density measurement and its application
Comparative simulation of microwave probes for plasma density measurement and its application
2016
Dae Ung Kim
Sin Jae Yu
Sijun Kim
Jang Jae Lee
Gwang-Gi Kim
Yeong Seok Lee
Hui-Jung Yeom
Ba-Da Lee
Jeong Hyeong Kim
Wang-Yeol O
Keywords:
Optoelectronics
Microwave probe
Materials science
plasma density
Microwave
Correction
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