Pulsed UV laser applications for surface science: nanostructure fabrication to diamond deposition

Pulsed UV lasers such as the 4th harmonic emission of Nd:YAG laser at 266 nm and ArF excimer laser at 193 nm have been used for surface modification of polymer surfaces, nano- structure fabrications on polymers and silicon substrates, and diamond deposition using photoablated polymer plumes. We report research carried out in our laboratory on these three topics.© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.