Electron microscope and the composite illumination lens
2006
The present invention, by using a hologram diffraction pattern, and an object thereof is to provide a composite illumination lens used in the electron microscope and the electronic microscope to reconstruct the microscopic image without imaging aberrations caused by the imaging lens. Electron microscope of the present invention, an electron source (11), a condenser lens (12), first and second electron beams parallel to each other while the supplied electron beam coherent from the condenser lens (12) (L1, L2 a biprism (13) for dividing the), the first electron beam (L1) and parallel wave, a composite illumination lens to converge wave converging second electron beam (L2) by a predetermined distance (15), a sample stage (16) for holding a sample to be irradiated to the first electron beam (L1), the first electron beam (L1) and the second electron beam (L2) detecting the hologram diffraction pattern formed by interference a detector (17) for the detector (17) by applying a predetermined Fourier transform on the supplied holograms from microscopic arithmetic processing unit for reconstructing the microscopic image of the sample (18), the reconstructed And a display (19) for displaying an image.
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