Towards low voltage resistive switch in sol-gel derived TiO2/Ta2O5 stack thin films

Abstract Herein, we report a memristive response from Pt/TiO 2 /Ta 2 O 5 /Pt stack thin films with low SET and RESET voltages, and resistance ratio of 10 3 . For the first time, Pt/TiO 2 /Ta 2 O 5 stack thin films were produced by sol-gel procedure. The morphology and elemental composition of Pt/TiO 2 /Ta 2 O 5 stacks were studied by a set of complementary techniques, including scanning electron microscopy (SEM), field-emission electron microscopy (FE-SEM), atomic force microscopy (AFM), and X-ray photoelectron spectroscopy (XPS). The thickness of the material was estimated from the transmittance spectrum by Pointwise Unconstrained Optimization Approach (PUMA).