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1702 Crystal Plasticity Analysis of Dislocation Accumulation in Nano-meter Sized STI Type ULSI Cells
1702 Crystal Plasticity Analysis of Dislocation Accumulation in Nano-meter Sized STI Type ULSI Cells
2010
Michihiro Sato
Tetsuya Ohashi
Naoya Hasegawa
Takuya Maruizumi
Keywords:
Nanometre
Plasticity
Dislocation
Materials science
Forensic engineering
Composite material
crystal plasticity
Nanotechnology
Correction
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