High-responsivity high-speed and high-power partially depleted absorber waveguide photodiodes with relaxed coupling tolerances

We reported a partially depleted absorber evanescently coupled waveguide photodiode that achieves 17 mA saturation current, 0.81 A/W responsivity, >50 GHz bandwidth and /spl plusmn/2.0 /spl mu/m (/spl plusmn/1.3 /spl mu/m) horizontal (vertical) -1 dB coupling tolerances.