Designing and Analyzing on Thermoelectric Cooler for Turbomolecular Pump Cooling Applications

Rotor temperature of turbomolecular pump (TMP) requests less than 120 °C due to the heat may be prone to deposit reaction products. For example, TMP of ULVAC products use water cooling from the chiller for controlling heat generated in the rotor. We designed and made the controller of thermoelectric cooler (TEC) for cooling of TMP without the water cooling from the chiller. The TEC for TMP cooling was designed and analyzed by Finite element method to study the generated heat and transfer phenomena of the waste heat to another section of the apparatus. The controller applied the control though Arduino board into a switching system to be driven DC current to TEC for 6 modules. The result showed that the TEC could be controlled for TMP cooling in the temperature range of 15–25 °C and the waste heat released to environment less than 40 °C, approximately.