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Structural and electrical properties of Ta 2O 5 thin films deposited on Si (1 0 0) from Ta(OC 2H 5) 5 precursor
Structural and electrical properties of Ta 2O 5 thin films deposited on Si (1 0 0) from Ta(OC 2H 5) 5 precursor
2003
Florence Jolly
M. Passacantando
Vicenzo Salerni
L. Lozzi
P. Picozzi
S. Santucci
Keywords:
Inorganic chemistry
Materials science
Leakage (electronics)
Thin film
X-ray crystallography
X-ray reflectivity
Analytical chemistry
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