The substrate processing method and substrate processing system

The substrate processing system, comprising a conditioning chamber (6), in the conditioning chamber (6) at least one substrate processing means (4) and a transport device for transporting disk-shaped vertically oriented substrates (3) on the substrate treatment device (4) pass, wherein - the transport device comprises at least two movably mounted substrate carrier (1, 2) each having a base body (11, 21) having a substrate support surface (12, 22) and substrate holding means (13, 23), the substrate supporting surface (12, 22) according to limit down, - two substrate support (1, 2) in a transfer position (63) can be brought, in which the substrate support (1, 2) with mutually facing substrate support surfaces (12, 22) and facing the substrate holding means (13, 23) are arranged parallel to each other, - the substrate holding means (13, 23) of the two substrate carrier (1, 2) are arranged in the vertical direction at the same height and in the horizontal direction relative to each other so that the substrate holding means (13, 23) of the two substrate carrier (1, 2) in the transfer position (63) engage with each other, and - the two substrate carrier (1, 2) at least in the transfer position (63) are pivotable between a first tilt position and a second, opposite with respect to the vertical inclined position back and forth.