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Fabrication of 4-inch β-Ga 2 O 3 Bulk Substrates and Homoepitaxial Films by EFG and HVPE Methods
Fabrication of 4-inch β-Ga 2 O 3 Bulk Substrates and Homoepitaxial Films by EFG and HVPE Methods
2020
Chia-Hung Lin
Quang Tu Thieu
Ravikiran Lingaparthi
Thangaraja Amutha
Yuki Uchida
Fumio Otsuka
Kimiyoshi Koshi
Shinya Watanabe
Kohei Sasaki
Akito Kuramata
Keywords:
Optoelectronics
Materials science
Fabrication
Correction
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