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CNM embedded in Co/Al 2 O 3 /SiO 2 substrate for LSI submicron hole using supercritical ethanol
CNM embedded in Co/Al 2 O 3 /SiO 2 substrate for LSI submicron hole using supercritical ethanol
2018
Jun Owatari
Yuki Matsumae
Yoshio Uhara
Masatoshi Ito
Shigeru Saito
Keywords:
Supercritical fluid
Substrate (chemistry)
Ethanol
Inorganic chemistry
Materials science
Chemical engineering
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