Structural analysis of anatase polycrystalline films using time-dependent deformation behavior

We introduce an analytical technique for time-dependent deformation behavior of polycrystalline films using a nanoindenter. This technique permits evaluation of structural deformation of thin films in the nanometer scale. The void structure of polycrystalline films of anatase was evaluated using time-dependent deformation behavior. The void structure was examined using a power-law model in which a strain rate sensitivity exponent m of the sample was determined. The m value enabled us to detect the existence of the void structure. In this study, appropriate conditions were determined to measure deformation behavior of polycrystalline films. The analysis of time-dependent deformation behavior is useful for investigating the void structure of polycrystalline films.