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Reactive ion etching of InP and InGaP using CH□/H□mixtures
Reactive ion etching of InP and InGaP using CH□/H□mixtures
1992
chenchangru
Chang-Ru Chen
Zhangguo Ming
Guo-ming Zhang
Keywords:
Reactive-ion etching
Inorganic chemistry
Optoelectronics
Materials science
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