Standardization of test methods for bulk micro-defects and denuded zones in annealed CZ silicon

The requirement to standardize measurement methods for BMD (Bulk Micro Defect) density and DZ (Denuded Zone) CZ (Czochralski) silicon has lead to the establishment of a SEMI standard for annealed CZ silicon wafers. Therefore, it was decided that we should aim at standardizing the preferential-etching and 90-degrees laser-scattering tomography techniques as a collaborative work between JEITA (Japan Electronics and Information Technology Industries Association) and JSPS (Japan Society of Promotion of Science) 145 th Committee. In this work a set of round robin tests were curried out. Regarding standardization, both the preferential etching and the 90-degrees laser-scattering methods were examined. This resulted in a standardized measurement protocol for BMD density and DZ width, which has become known as the JEITA standard EM 3508[1].