The piezoelectric micro-pump

A be formed diaphragm with a soft material, can be transmitted without wasting a displacement of the piezoelectric element as a change in volume of the pump chamber, providing excellent piezoelectric micropump fluid transport capability. The A pump chamber 6 is isolated by the diaphragm 3, the piezoelectric element 2 is disposed on the rear surface of the diaphragm 3, the diaphragm 3 to follow deformed by bending deformation of the piezoelectric element 2, the pump chamber a pump chamber 6 is volume change a piezoelectric micro pump for transporting a fluid within 6. The support member 1a As a result, it is possible to convey reliably displacement of the piezoelectric element 2 as the volume change of the pump chamber 6, thereby improving the fluid transport capability. .FIELD 5