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Fatigue Life Investigation of the 15 μ m Thick ThELMA ™ Epitaxial Polysilicon
Fatigue Life Investigation of the 15 μ m Thick ThELMA ™ Epitaxial Polysilicon
2008
Eleonora Ferraris
Irene Fassi
Marco Del Sarto
Keywords:
Epitaxy
Electronic engineering
Metallurgy
Materials science
Inorganic chemistry
Analytical chemistry
Engineering physics
Structural engineering
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