Growth and structural characterization of strained epitaxial Hf0.5Zr0.5O2 thin films

This work was partially supported by Ministerio de Economia y Competitividad through projects MAT2014-51982-C2, MAT2015-68760-C2-1-P and MAT2017-82970-C2, and from regional Gobierno de Aragon through project E26 including FEDER funding.