The role of ZrCl4 partial pressure on the growth characteristics of chemical vapour deposited ZrC layers

Saphina Biira,Philip Crouse,Thulani Thokozani Hlatshwayo,E.G. Njoroge,J.T. Nel,T.P. Ntsoane,J.B. Malherbe

The role of ZrCl4 partial pressure on the growth characteristics of chemical vapour deposited ZrC layers

2017

Saphina Biira
Philip Crouse
Thulani Thokozani Hlatshwayo
E.G. Njoroge
J.T. Nel
T.P. Ntsoane
J.B. Malherbe

Necsa and the Department of Science and Technology of South Africa through the Nuclear Materials Development Network of the Advanced Metals Initiative.

Keywords:

Microstructure
Metallurgy
Chemical vapor deposition
Science, technology and society
Atmospheric pressure
Partial pressure
Carbide
Zirconium carbide
Materials science
Argon
Deposition (law)

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