HIGH TEMPERATURE PROPERTIES OF MINIATURIZED THICK-FILM COMPONENTS

This paper presents systematic studies of thick-film or LTCC microcomponents (capacitors, inductors) made with the aid of laser-shaping and operating at temperature up to 450 °C. The minimum dimensions i.e. conductive path width and spacings were about 30 μm. Such small patterns have been created by laser cutting of fired Au- or Ag-based conductive films. Laser system equipped with Nd:YAG-laser (beam wavelength of 1064 nm) was applied. The inductance, capacitance, as well as parasitic impedances were measured in the frequency range from 10 kHz to 110 MHz and temperature between 25 °C and 450 °C.