Novel micro valve device for disconnecting link

The invention discloses a novel micro valve device for a disconnecting link. The novel micro valve device is formed by bonding an upper silicon wafer and a lower silicon wafer. The first silicon wafer layer is provided with an electrode port which is vertically through. A cavity is formed in the bottom surface of the first silicon wafer layer. Movable components are arranged in the cavity. A gate and a piezoelectric actuating part are arranged on the movable components. The second silicon wafer layer is provided with a liquid inlet, a liquid outlet and a control port which penetrate vertically. A groove is formed in the top surface of the second silicon wafer layer. A flow path is formed in the groove. After the first silicon wafer layer and the second silicon wafer layer are bonded, a closed cavity for liquid in the micro valve is formed by the cavity of the first silicon wafer layer, the liquid inlet, the liquid outlet, the control port and the groove of the second silicon wafer layer, the bottom surface of the first silicon wafer layer, and the top surface of the second silicon wafer layer. According to the novel micro valve device, the gate and the flow path are designed on the two different silicon wafer layers correspondingly, and the disturbance resistance of the structure is improved; and the low-leakage requirement of a micro valve is met through the formation of the internal closed cavity.