Transport device for a vacuum processing system, drive means for an installation component of a vacuum processing system, and the vacuum processing system

The invention relates to embodiments of a transport device for a vacuum processing system, a drive device for high-temperature processes in vacuum processing equipment, and a vacuum processing system with such driving means. to develop the solution of the problem, a drive device, in particular for an installation component of a Vakkumprozessanlage, which operates polygon effect-free, can be connected endlessly, is suitable for high temperatures, is not sensitive to radiant heat, generated no outgassing and no lubricant is required, by a drive device achieved for a system component of a vacuum processing system comprising a at least two deflection rollers (2) guided traction means (4), wherein the pulling means (4) is an endless metal belt.