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Fabrication of MEMS energy harvester based on multilayer PZT thin films
Fabrication of MEMS energy harvester based on multilayer PZT thin films
2018
Shota Hirai
Kensuke Kanda
Sano Ryo
Fujita Takayuki
Maenaka Kazusuke
Keywords:
Thin film
Microelectromechanical systems
Composite material
Materials science
energy harvester
Fabrication
piezoelectric mems
Optoelectronics
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