Electroplating apparatus equipped with electroplating solution recovery device

2012 
The invention provides an electroplating apparatus equipped with an electroplating solution recovery device, comprising an electroplating solution tank, an electroplating solution collection tank, a solution inlet selection switch, an electroplating solution analysis unit, a control unit and a filter device, wherein the solution inlet selection switch is connected to the electroplating solution tank through a solution delivery pipe; the electroplating solution is connected to the electroplating solution analysis unit through a waste discharge pipe; the filter device is arranged between the electroplating solution analysis unit and the electroplating solution tank; the electroplating solution analysis unit is connected to the electroplating solution collection tank through a waste solution collection pipe; and the control unit is respectively connected to the solution inlet selection switch, the electroplating solution analysis unit and the electroplating solution collection tank. The electroplating solution discharged from the electroplating solution tank is discharged by the waste discharge pipe and filtered by the filter device; hereafter, the electroplating solution filtered by the filter device is analyzed by the electroplating solution analysis unit; and if the filtered electroplating solution is usable, the filtered electroplating solution is injected into the electroplating solution collection tank through the waste solution collection pipe.
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