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Study on nanostructured silicon carbon thin films deposited by PECVD
Study on nanostructured silicon carbon thin films deposited by PECVD
2013
D.K. Basa
G. Ambrosone
U. Coscia
Keywords:
Thin film
Carbon film
Carbon
Plasma-enhanced chemical vapor deposition
Composite material
Silicon
Materials science
Optoelectronics
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