Influence of the gas atmosphere on the microstructure and mechanical properties of diamond-like carbon films by arc ion plating

Abstract Diamond-like carbon (DLC) films were prepared on Si (100) substrates under Ar, H 2 and C 2 H 2 gas atmosphere by arc ion plating (AIP). The influence of gas atmosphere on the film microstructure and mechanical properties was studied by Raman spectra, X-ray photoelectron spectra (XPS) and nanoindentation technique. The results show that the film deposited under Ar had the smallest I D / I G ratio, the largest sp 3 C content, the maximum hardness of 34.8 GPa and the maximum elastic modulus of 236.9 GPa, compared with those under H 2 and C 2 H 2 gas atmosphere.