Enhanced optical coherence vibration tomography for subnanoscale-displacement-resolution calibration of piezoelectric actuators

Abstract We report a subnanoscale-displacement-resolution optical coherence vibration tomography (SOCVT) system for real-time calibration of piezoelectric actuators. The calibrations of the actuators at nanoscale or microscale displacement ranges were performed by varying the input voltage over the entire range in the ascending and descending directions. The computational and experimental results demonstrated that the developed SOCVT could be used to characterize the dynamic hysteretic behavior, nonlinear effect, and impulsive behavior of piezoelectric actuators. The SOCVT technique is non-contact and non-invasive in nature, making it ideal for real-time and in situ ultra-precision calibration of piezoelectric actuators, which are widely used in active vibration control and nanopositioning.