Non-equilibrium kinetics in N2 discharges and post-discharges: a full picture by modelling and impact on the applications
2011
The main concerns associated with the establishment of a self-consistent model for N2 discharges and post-discharges at low pressures (typically p ~ 1 Torr), as well as in mixtures of this gas with O2 and CH4 are analysed and discussed. The focus is given on the coupling of the various kinetics involved: electrons, vibrational molecules N2 , dissociated atoms N(4S), ionic species, and various atomic and molecular electronic states. The impact of N2–O2 and N2–CH4 systems on the applications is briefly summarized by reviewing the essential kinetics. The difficulty in incorporating a self-consistent model for the surface kinetics is also discussed and a state-of-the-art approach for wall reactions is presented.
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