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TEM-EELS Investigation of Boron and Phosphorus Passivated 4H-SiC/SiO$_{2}$ Interface Structures
TEM-EELS Investigation of Boron and Phosphorus Passivated 4H-SiC/SiO$_{2}$ Interface Structures
2017
Christopher Klingshirn
Joshua A. Taillon
Gang Liu
Sarit Dhar
L. C. Feldman
T. Zheleva
Aivars J. Lelis
L. Salamanca–Riba
Keywords:
Boron
Phosphorus
Inorganic chemistry
Materials science
Chemical engineering
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