Deposition of Ba1−xSrxTiO3 and SrTiO3 via liquid source CVD (LSCVD) for ULSI DRAMS

Abstract In 1991 we demonstrated the use of a deposition machine that injected liquid sol-gel material into a vacuum chamber at room temperature for the production of high quality lead zirconate titanate (PZT) thin films. This year we have modified the machine to produce strontium titanate and barium strontium titanate films of sufficient quality for DRAM applications.