Radiation-induced structure modification in monocrystalline silicon under high-energy C6+ irradiation

This paper concerns surface morphology and structural modification in silicon after 1.2 GeV C 6+ irradiation. A number of experimental techniques was used, including atomic force microscopy, x-ray photoelectron spectroscopy and x-ray diffraction studies. The formation of nanometer-sized hillocks on the surface was revealed. In the bulk of parallel-irradiated specimens amorphous regions formation was discovered.