A flange-type standard leak element and its vacuum applications
2021
Abstract A previous article [C.K. Chan et al., Vacuum 180, 109,650 (2020)] described a gasket-type standard leak element (SLE) that could be employed to solve the problem of serious outgassing and the constraint of a low baking temperature (
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
11
References
3
Citations
NaN
KQI