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Investigation of the Mechanism Behind Ablation of Dielectrics from Silicon
Investigation of the Mechanism Behind Ablation of Dielectrics from Silicon
2013
S.E. Foss
J. Thorstensen
Keywords:
Dielectric
Silicon nitride
LOCOS
Monocrystalline silicon
Silicon on insulator
Hybrid silicon laser
Materials science
Optoelectronics
Ablation
Silicon
Correction
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