Parasitic Resistance-Based High Precision Capacitive MEMS Accelerometer Phase Shift and Its Usage for Temperature Compensation

A novel parasitic resistance-based high precision capacitive MEMS accelerometer temperature compensation method is proposed. The performance of MEMS accelerometer is severely affected by temperature drift. After a careful modeling analysis of the MEMS sensor, it is found that phase shift of the system is majorly affected by the parasitic resistor of the sensor cap. Thus, it can be used for sensor temperature compensation. Detailed analytic models and simulations are provided. Experimental results show that the bias stability is reduced from 0.26 to 0.18 mg after real-time temperature compensation. The temperature drift is reduced.