Temperature drift error compensation method of MEMS (Micro-electromechanical System) sensor group

The invention relates to a sensor group and particularly relates to a micro-electromechanical system and accelerometer inertia sensor measurement group. The invention relates to a temperature drift error compensation method of an MEMS (Micro-electromechanical System) sensor group. After the temperature drift error compensation method of the MEMS sensor group is used for compensating, the output zero-error stability of a static test and a temperature cycling test of the MEMS sensor group is greatly improved.