Ultrashort Pulsed-Laser Fabrication of Silicon Moth-Eye Structures for Terahertz Anti-Reflection

We fabricate moth-eye anti-reflection structures for the terahertz region on high-resistivity silicon substrates by ultrashort pulsed-laser ablation. We demonstrate 1.4 times increased THz yield from Mg:LN by using the moth-eye structure as an output coupler.