Grayed radio sensor element and grayed radio sensor

2016 
A leverage GSR sensor is ultrasensitive micro magnetic sensor has a magnetic field detection capability comparable to the SQUID and cryogenic support system and the magnetic shield room is not required, small and inexpensive grayed radio sensor element Handy and to provide a grayed radio sensor. A The GSR sensor element is ultrasensitive micro magnetic field detecting element to the substrate 101 on the plane, a plurality arranged in Z-direction, parallel concave grooves guide 14 and the substrate side of the two parallel elements 2 without deviation from the reference line by fitting the convex guide 15 of the present to match the characteristics of the plurality of magnetic field detecting element, by reducing the external magnetic field noise, but that does not require a magnetic shield room is there. .FIELD 1
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