Synthesis of silicon carbide powders by a CW CO2 laser

Abstract Ultrafine SiC ceramic powders have been produced by irradiating silane and acetylene mixtures with a CW CO 2 laser. The work is mainly concerned with the evaluation of the parameters affecting the material production efficiency: laser power and laser intensity, pressure in the reaction chamber, reactant and carrier gas flow rates. The characterization of the produced material refers to particle composition, size and shape and crystalline structure. Sintering tests have been made in order to evaluate the performances of laser-produced ceramic powders. Preliminary measurements aimed at the evaluation of the feasibility of process scaling-up have been also carried out.